From A to B – automatically to the destination

Our transport systems allow material flows in highly clean environments to be automated individually. We focus on proven concepts such as stationary conveyor solutions as well as on mobile and free-moving robotic systems with innovative man-machine interactions. The range is completed by manual input and output stations as an interface to automatic overhead transport systems.

Overview of transport systems

Automated Guided Vehicle (AGV)
Rail Guided Vehicle (RGV)
Person Guided Vehicle (PGV)
Conveyor
Loadports

Automated Guided Vehicle (AGV)

The HERO ® FAB 200 with four buffers for SMIF pods

HERO Fab

Mobile robot system for quick transport and automatic handling of wafer cassettes

Advanced mobile robot for transportation and handling of reticle pods

HERO Scout

Mobile robot for flexible and safe reticle transport and handling

Rail Guided Vehicle (RGV)

hero-rail-rgv-cleanroom-fabmatics

HERO Rail

Rail-guided transport and automated handling system for wafer cassettes

Person Guided Vehicle (PGV)

RFID trolley for the cleanroom

RFID trolley

Ideal logistics solution for fab areas where automatic transport is not possible or necessary

Conveyor

Roller conveyor with turntables and lifts for wafer transport on two levels

Conveyor System for Cleanroom Production

Automated conveyor system for clean rooms.

Loadports

Smart Load Port

Smart Load Port

Input/Output station with two ports and operator GUI for manual access

Fabmatics GmbH

Slim Load Port

Slim input/output station for manual access at any location of the factory