Conveyor System for Cleanroom Production
With our automated roller conveyor transport system for cleanrooms, manual wafer transportation in semiconductor fabs is now a thing of the past. Automated material transport to the process system saves valuable operator time, reduces throughput times and therefore improves overall production efficiency.
Intelligent conveyor system for the semiconductor industry
The cleanroom-compatible roller conveyor conveys different types of transportation boxes such as FOUPs, SMIF pods, HA200 boxes, open wafer cassettes and customer-specific wafer boxes.
Arranged in zones, the separately actuated drive motors of the roller conveyor transport system guarantee collision-free automated transportation. Furthermore, the system can accelerate or decelerate the transported goods at different speeds in the sections. To ensure that the drive side is synchronized with the passive rollers, the rollers are connected to hollow shafts at regular intervals.
The system’s versatile combination of line, lift, and rotating elements enables the implementation of highly customized wafer transport solutions in semiconductor fabs. It provides excellent options, particularly for maximizing limited space.The transport system can integrate multiple production levels of a fab.
By incorporating additional work steps such as reading carrier IDs and wafer IDs, mapping, and aligning wafers into the transportation process, it significantly saves time along the transport route.
Lastly, a special feature of the conveyor system for cleanrooms is the simple and flexible control via integrated micro-controllers. Due to the modular design of the conveyor elements and the straightforward cabling, the conveyor system can be quickly implemented into active production in semiconductor fabs.
Special features of the conveyor system:
- Meets the requirements of clean room class ISO 3 / US FED 1
- Configurable for different product sizes
- System extensions are possible at any time
- Automation and integration options with SEMI E82; E84; E99
- Easy installation and integration during ongoing production thanks to the modular design
- Simple and flexible control via built-in micro-controllers
Realized automation scenarios in semiconductor fabs:
- Intrabay and interbay transportation of 200mm wafer cassettes under the clean room ceiling, transportation to the process system via lift systems and mobile robot systems at operator level
- Wafer box movement across three factory floors incl. input and output stations at operator level
- Empty Pod Management – Buffering of transportation boxes under the clean room ceiling
