Intelligent systems for space-saving storage

The automated cleanroom storage systems by Fabmatics are optimally designed for fast, safe and space-saving storage and buffering of different product carriers. But also by using the manually operated storage solutions, each individual part can be quickly found thanks to integrated RFID systems. Our Purge system reliably protects wafers during interim storage from contamination.

Overview of storage systems

Stocker Systems
Racks
Purge Systems

Stocker Systems

FlatStocker installation with storage bins

FlatStocker

Storage of material carriers where floor space is limited

Cube Stocker

CubeStocker

Floor-based, automatic storage system with its own cleanroom atmosphere

Zero Footprint Storage

ZFS (Conveyor)

Space-saving storage underneith the cleanroom ceiling with Zero Footprint Storage from Fabmatics

Test Wafer Center Exterior View

Test Wafer Center

All-in-one-solution for the automated management of test wafers

Racks

RFID shelf for semiconductor industry to store carrier boxes

RFID Rack

Products will be identified when placed and become subsequently traceable stored

Purge Systems

ZFS Advanced Purge Nest Unit (APNU) for Spectra / A300 FOUP.

FOUP Purge System

Retrofittable Purge System reliably protects wafers between process steps