Robots in the clean room

Our systems for the handling of wafers, reticles and carriers in the semiconductor industry, as well as for similar substrates in micro and nanoelectronics make manual intervention superfluous.

Overview of handling systems

Carrier Handling
Wafer Handling
Reticle Handling
Mobile Robots
Handling Tools

Carrier Handling

ACH-LUNA

Classic robotic cell for automated machine loading and unloading of carriers

Carrier Gripper

Automated carrier handling system enables handling on existing tools

Test Wafer Center

All-in-one-solution for the automated management of test wafers

Wafer Gripper, 100 to 450 mm

Gripper system for automated handling of single wafers in various sizes

EUV-Reticle-Handling

High cleanroom quality for EUV-Lithography reticle handling by Fabmatics

Reticle Gripper

Gripper for safe and reliable handling of individual photomasks

HERO®FAB

Mobile robot system for quick transport and automatic handling of wafer cassettes

HERO Scout

Mobile robot for the most flexible and safe reticle transport and handling

FOUPopener

Manual instrument to open and lock 300mm FOUPs with two hands