HERO Scout – Automated reticle transport and handling in the cleanroom

As the latest addition to our successful, field-proven family of HERO Mobile Robots, HERO Scout is designed with state-of-the-art technology, redefining flexibility and security in the transportation and handling of reticle pods. The automated transport and handling of reticles enables a more efficient, consistent and safe lithography process within semiconductor manufacturing.

AMR for Reticle Transport and Handling in the Cleanroom

The HERO Scout is a state-of-the-art mobile robot, specifically designed for flexible transportation and secure handling of reticle pods in semiconductor manufacturing and cleanroom environments. Equipped with an innovative 6-axis cobot, the HERO Scout effortlessly manages the loading and unloading of mask load ports at different heights. As the smallest cleanroom-compatible autonomous mobile robot on the market, it impresses with its ultra-clean quality and maximum reach. Discover the future of safe reticle pod transport with the HERO Scout – your solution for efficient and reliable production in the semiconductor industry.

Key Features & Benefits

Compact Size: Minimum footprint enables operation in narrow aisles and fab areas.
Long Reach: The 6-axis precision cobot arm is ideal for loading high, ergonomically challenging positions.
Flexible Operation: HERO Scout autonomously navigates with 3D cameras for obstacle detection and bypassing, providing both track-bound & freeroaming driving options to meet the most diverse production needs.
Safety First: Reliable sensors ensure safe operation in environments where humans and machines work closely together.
Fast Deployment: Short setup with SLAM and auto-teaching, minimal adjustments to production changes, and “auto-gripping” enable rapid re-engagement after maintenance, reducing downtime.
Cleanroom Compatibility: ISO 2 certified.