Automated Loading Unit for your Cleanroom

A robot cell with 6-axis robot is the central element of the LUNA-type (Loading Unit Advanced) Automatic Carrier Handling (ACH). LUNA systems are individually adapted to the specific setup conditions, but build on from standardized modules.

The possible variants range from solutions with upright robots, to solutions with suspended robots, solutions with integrated stocker areas for batches, SECS, E23 and E84 interfaces, and a number of options such as Manuport, RFID reader, load port monitoring and camera-based control technology incorporating image processing.