The All-In-One Test Wafer Management Solution in Semiconductor Manufacturing

Test Wafer Center by Fabmatics

Test Wafers - the Unsung Heroes of Semiconductor Production

Test wafers are essential for testing and development of new processes, equipment qualification, and process monitoring activities. Yet, they often don't get the attention they deserve.

A significant portion of the total wafer inventory in a fab consists of test wafers (ranging between 25 - 50%). Managing such amounts of test wafers in semiconductor fabs presents a unique set of challenges essential to maintaining productivity and efficiency. Test wafers, which include all non-product wafers, are fundamental to fab operations. Their importance often becomes visible only when they are not available, impacting operations significantly. Unlike product wafers, test wafers serve multiple specialized functions, such as process equipment qualification, conditioning for production readiness, and calibration of measurement tools. Consequently, they come in many varieties, including thickness or particle measurement wafers, conditioning wafers, filler wafers, monitor wafers, mechanical handling wafers, and calibration wafers, each requiring specific handling and preparation.

Ensuring Availability and Minimizing Downtime

One of the main challenges in test wafer management is ensuring the continuous availability of the "right" test wafer type when needed. This is critical because a lack of suitable test wafers at key moments, such as after maintenance or equipment re-qualification, can extend downtime. This in turn increases cycle time, thus reducing fab capacity and impacting productivity. To mitigate this, fabs maintain substantial inventories of various types of test wafers. For some fabs, these inventories are strikingly high, —sometimes reaching a 1:1 ratio between product and test wafers. This sheer volume emphasizes how critical and complex test wafer logistics is within a semiconductor fab. 

Carrier Management: An Overlooked Complexity

Another challenge lies in carrier management, as test wafer carriers typically hold fewer wafers than product carriers. While product carriers can contain up to 25 wafers, test wafer carriers frequently carry just one to three wafers. This difference requires fabs to carefully manage both the carriers and storage space, ensuring enough carriers are always available for both product and test wafers. 

Prioritization and Automation: Key Solutions

To address these complexities, test wafers need to be prioritized alongside product wafers, with well-defined setup protocols in the MES (Manufacturing Execution System) and clear ownership among engineering teams. Automating processes like kitting, de-kitting, and the transport of test wafer carriers plays a vital role in streamlining test wafer management and maintaining the overall efficiency of fab operations. 

Our Solution: A Revolution of Test Wafer Management

The Test Wafer Center transforms material logistics, streamlining the preparation, qualification, and reclaiming flows, ensuring the quality of your fab’s output. Give your test wafers the attention they deserve!

The Test Wafer Center (TWC) fully automates kitting and de-kitting of test wafer lots as well as their storage. Its compact and highly flexible layout allows up to 93 storage bins and up to 14 material handling locations making it the perfect solution for complex equipment qualifications scenarios. It gives you complete (remote) control for determining timing and content of each test wafer lot & enables just-in-time delivery to your process equipment.

Efficiency, Cleanliness, and Control: The Benefits of Test Wafer Management with the TWC

test wafer

Speed & Efficiency: Fully Automated, Just-in-Time Test Wafer Logistics

The Test Wafer Center (TWC) automates kitting, de-kitting, and precise just-in-time delivery of test wafers, ensuring they’re always ready for your process equipment. This reduces manual handling and minimizes carrier transfers, freeing up Automated Material Handling Systems (AMHS) or manual transport resources. Complete traceability keeps every step accounted for, saving time and preventing errors that can slow down production.

Cleanliness & Material Protection: ISO 3 Clean for Sensitive Wafer Handling

Operating within an ISO 3 mini-environment, the TWC provides ultra-clean wafer handling, ideal for installations in gray space. With advanced error detection (like cross-slotting, double-slotting, and data inconsistencies), the TWC ensures that handling errors are caught and corrected early, protecting both wafer quality and process integrity.

Test Wafer Center Aligner

Test Wafer Center in the cleanroom

Space & Footprint Optimization: Maximize Cleanroom Efficiency

The TWC centralizes test wafer management, replacing scattered handling tools and saving valuable cleanroom space. Its compact, flexible design—offering up to 93 storage bins and 14 handling locations—fits seamlessly into tight spaces, even allowing wall or corner installations. This advanced layout optimizes cleanroom space and enhances workflow efficiency.

The storage capacity for test lots can easily be expanded by placing our CubeStocker directly next to the TWC. The CubeStocker can automatically store up to 200 additional wafer cassettes providing you with all the flexibility you need.

Resource Optimization & Traceability: Smarter Management, Better Insights

With SECS host communication, camera-based robot routing, and automated error recovery, the TWC provides uninterrupted substrate tracking and a complete wafer history per SEMI E90 standards. This comprehensive tracking and error recovery improves overall equipment effectiveness (OEE) and simplifies maintenance, making fab resource management smarter and more efficient.

Why Fabmatics?

Fabmatics has the unique competence to offer complex automation, robotics and handling systems for the use under cleanroom conditions, from hardware and software, from consulting and development to production and installation to after sales service.

Each one of our products and solutions can be added and integrated seamlessly into existing production lines – always adapting to our customer’s needs.

In addition, our extensive expertise enables us to design, create and implement your greenfield fabs material flow and handling automation from scratch – all from a single source.

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More storage capacity needed?

A combination of the TWC and our floor-based, fully automated storage system CubeStocker, gives you all the flexibility you need!

CubeStocker is a space-saving, fully automated storage system e.g. for open 200mm wafer carriers in cleanrooms. It creates an ISO 3 cleanroom environment for particle-free intermediate storage, helping buffer production without impacting yield quality.

The system can be placed in greyrooms (ISO 6) to save cleanroom space. It holds up to 200 wafer cassettes, uses RFID for material identification, and features a robot portal for precise, vibration-free handling.

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