Our field-proven fleet of mobile robots - our HERO's -  are your perfect match for the handling and transport of wafers, reticles and carriers in the semiconductor industry, as well as for similar substrates in micro and nanoelectronics. They make manual intervention superfluous, helping you to optimize the material flow in your fab.

Navigating their way either autonomously, track- or rail-bound through semiconductor fab's wordwide, they truly are heroes in the cleanroom and make sure that the right material arrives at the right time.

Explore how our automation solutions fit into your manufacturing environment and elevate your fab’s performance, setting new standards for productivity and competitiveness.

This rail guided robot by Fabmatics is able to load and unload process tools and enables a fast carrier transportation from process tools to the transport system in the cleanroom.

The HERO Rail combines a robot system with an innovative drive unit. It is designed to fully automatically load and unload process tools, and enable fast transportation between process tools and the transport system in the cleanroom. The main focus and challenge lie in the interactive co-operation between human and machine – operator and robot.

Reliable and robust, the HERO Rail operates 24 hours a day, 7 days a week in the cleanrooms of semiconductor factories worldwide. As an integral part of an overall system for the fully automated production flow of wafers, it ensures throughput time savings and higher plant utilization.

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Fabmatics has been successfully implementing customer-specific automation projects in the semiconductor industry for more than 30 years. Our team of more than 300 experts has the unique competence to offer complex automation, robotics and handling systems for the use under cleanroom conditions, from hardware and software, from consulting and development to production and installation to after sales service.

Each one of our products and solutions can be added and integrated seamlessly into existing production lines – always adapting to our customer’s needs. In addition, our extensive expertise enables us to design, create and implement your greenfield fabs material flow and handling automation from scratch – all from a single source.

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